Lab for Thin Films - Nanobiomaterials - Nanosystems - Nanometrology

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Ellipsometry

In-situ

In-situ Phase Modulated Spectroscopic Ellipsometer (1.5-6.5 eV) equipped with Ultra Fast Multi-Wavelength unit for real-time SE measurements for monitoring thin-film growth process.
In-situ Fourier Transform IR Spectroscopic Ellipsometer (0.1-0.5 eV) for monitoring thin-film growth process and polymer plasma treatment.
In-situ Phase Modulated Spectroscopic Ellipsometer (0.7-4.3 eV) for real-time monitoring thin-film growth by Sputtering and HIPIMS processes.

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Ex-situ

Ex-situ Phase Modulated Spectroscopic Ellipsometer with Variable Angle (1.5-6.5 eV) in reflection and transmission modes.

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In-line

In-line Phase Modulated Spectroscopic Ellipsometer (3-6.5eV) for real-time measurements.

Roll-to-Roll In-line Ellipsometer

OVPD In-line Ellipsometer

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