Lab for Thin Films - Nanobiomaterials - Nanosystems - Nanometrology


  1. "In-situ spectroscopic ellipsometry for monitoring the Ti-Si multilayers during growth and annealing"
    S. Logothetidis, I. Alexandrou and N. Vouroutzis
    Thin Solid Films 275, 44 (1996)
  2. "Optimisation of TiN thin-film growth with in-situ monitoring : the effect of bias voltage and nitrogen flow rate"
    S. Logothetidis, I. Alexandrou and S. Kokkou
    Surf. Coat. Techn. 80, 66 (1996)
  3. "The optical properties of á-C:H films between 1.5 and 10 eV and the effect of thermal annealing on the film character"
    S. Logothetidis, J. Petalas and S. Ves
    J. Appl. Phys. 79, 1040 (1996)
  4. "Titanium nitride films : Studies of growth with in-situ monitoring and the effect of deposition conditions on the films structure and quality"
    S. Logothetidis
    J. Mech. Behav. of Mater. 7, 15 (1996)
  5. "Dielectric function and reflectivity of 3C-silicon carbide and the component perpendicular to the c axis of 6H-silicon carbide in the energy region 1.5-9.5 eV"
    S. Logothetidis and J. Petalas
    J. Appl. Phys. 80, 1768 (1996)
  6. "Hydrogen-free amorphous carbon films approaching diamond prepared by magnetron sputtering"
    S. Logothetidis
    Appl. Phys. Lett. 69, 158 (1996)
  7. "In-situ and real time oxidation studies of the fcc TiN thin films at room temperature"
    S. Logothetidis and A. Barborica
    Microelectronics Enginnering 33, 309 (1997)
  8. "Amorphous carbon films rich in diamond deposited by magnetron sputtering"
    S. Logothetidis and M. Gioti
    Mater. Sci. Eng.B, 46, 119 (1997)
  9. "Studies of density and surface roughness of ultrathin amorphous carbon films, with regards to thickness with X-ray reflectometry and spectroscopic ellipsometry"
    S. Logothetidis and S. Stergioudis
    Appl. Phys. Lett. 71, 2463 (1997)
  10. "Properties and density of states of the interface between silicon and carbon films rich in sp3 bonds"
    S. Logothetidis, E. Evangelou and N. Konofaos
    J. Appl. Phys. 82, 5017 (1997)
  11. "Influence of conventional furnace and rapid thermal annealing on the quality of polycrystalline â - FeSi2 thin films grown from vapor-deposited Fe/Se multilayers"
    D.H. Tassis, C.A. Dimitriadis, S. Boultadakis, J. Arvanitidis, S. Ves, S. Kokkou, S. Logothetidis, O. Valassiades, P. Poulopoulos, N. K. Flevaris
    Thin Solid Films 310, 115 (1997)
  12. "Oxidation and structural changes in fcc TiNx thin films studied with X-ray reflectometry"
    S. Logothetidis, G. Stergioudis and P. Patsalas
    Surface Coatings Technology 100-101, 295 (1998)
  13. "Studies with non-destructive techniques of the composition, initial stages of growth and surface topography of thin amorphous carbon films"
    S. Logothetidis, G. Stergioudis and N. Vouroutzis
    Surface Coatings Technology 100-101, 486 (1998)
  14. "Transmission Electron Microscopy investigation of the structural characteristics of amorphous tetrahedral carbon films"
    Ch. B. Lioutas, N. Vouroutzis, S. Logothetidis and H. Lefakis
    Thin Solid Films 319, 144 (1998)
  15. "Phase transformation of hydrogen free amorphous carbon films under ion beam bombardment"
    Ch. B. Lioutas, N. Vouroutzis, S. Logothetidis and S. Boultadakis
    Carbon 36, 545 (1998)
  16. "New forms of hydrogen free amorphous carbon films"
    S. Logothetidis, M. Gioti and Ch. Lioutas
    Carbon 36, 539 (1998)
  17. "Carbon nitride thin films prepared by reactive rf magnetron sputtering"
    S. Logothetidis, H. Lefakis and M. Gioti
    Carbon 36, 757 (1998)
  18. "The effect of substrate bias in amorphous carbon films prepared by magnetron sputtering and monitored by in-situ Spectroscopic Ellipsometry"
    M. Gioti and S. Logothetidis
    Diamond and Related Materials 7, 444 (1998)
  19. "Post-growth modification of amorphous carbon films under ion beam bombardment : grain size dependence on the films thickness"
    S. Logothetidis, Ch.B. Lioutas and M. Gioti
    Diamond and Related Materials 7, 449 (1998)
  20. "Stability and interdiffusion at the a-C/Si(100) interface"
    S. Logothetidis, M. Gioti and P.C. Kelires
    Journal of Non-Crystalline Solids 227-230, 1113 (1998)
  21. "Investigation of boron nitride films deposited by rf magnetron sputtering with in-situ spectroscopic ellipsometry and stress measurements"
    S. Logothetidis, C. Charitidis, I.M. Kyprianidis, P. Patsalas and M. Gioti
    Journal of the Electrochemical Society Proceedings of the II Symposium on III-V Nitride and Processes 97-34, 142 (1998)
  22. "Optical properties and temperature dependence of the interband transitions of 3C- and 6H-SiC in the energy region 5-10 eV"
    J. Petalas, S. Logothetidis, M. Gioti and J. Janowitz
    Phys. Stat. Sol. B 209, 499 (1998)
  23. "Structural, magnetotransport and optical properties of sputtered Co/Cu multilayers examined as a function of Co layer thickness at the second antiferromagnetic maximum"
    C. Christides, S. Logothetidis, M. Gioti, G. Stergioudis, S. Stavroyiannis and D. Niarchos
    J. Appl. Phys. 83, 7757 (1998)
  24. "Stress relaxation and stability in thick amorphous carbon films deposited in layer structure"
    M. Gioti, S. Logothetidis and C. Charitidis
    Appl. Phys. Lett. 73, 184 (1998)
  25. "Low frequency noise in Schottky barrier contacts of titanium nitride on p-type silicon"
    F. Farmakis, J. Brini, M. Mathiew, G. Kamarinos, C. A. Dimitriadis and S. Logothetidis
    Semicond. Science Technol. 13, 1284 (1998)

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