Lab for Thin Films - Nanobiomaterials - Nanosystems - Nanometrology


Publications 2000

  1. "Real-time multiwavelength ellipsometry diagnostics for monitoring dry cleaning of si wafers and tinx deposition"
    V. Kechagias, M. Gioti, S. Logothetidis, R. Benferhat and D. Teer
    Thin Solid Films 364, 213 (2000)
  2. "In-situ and real-time ellipsometry monitoring of submicron titanium nitride /titanium silicide electronic devices"
    P. Patsalas, C. Charitidis and S. Logothetidis
    Applied Surface Science 154-155, 256 (2000)
  3. "The effect of substrate temperature and biasing on the mechanical properties and structure of sputtered titanium nitride thin films"
    P. Patsalas, C. Charitidis and S. Logothetidis
    Surface and Coatings Technology 125, 335 (2000)
  4. "A comparative study of the nanoscratching behavior of amorphous carbon films grown under different deposition conditions"
    C. Charitidis, S. Logothetidis and M. Gioti
    Surface and Coatings Technology 125, 201 (2000)
  5. "Sputtered amorphous carbon films: micro-structure, density, optical and mechanical properties"
    S. Logothetidis
    International Journal of Modern Physics B 14, 113 (2000)
  6. "A comprehensive study on the properties of multilayered amorphous carbon films"
    S. Logothetidis, C. Charitidis, M. Gioti, Y. Panayiotatos, M. Handrea and W. Kautek
    Diamond and Related Materials 9, 756 (2000)
  7. "Optical properties and new vibrational modes in carbon films"
    M. Gioti, D. Papadimitriou and S. Logothetidis
    Diamond and Related Materials 9, 741 (2000)
  8. "Crystalline structures of carbon complexes in amorphous carbon films"
    Ph. Komninou, G. Nouet, P. Patsalas, Th. Kehagias, M. Gioti, S. Logothetidis and Th. Karakostas
    Diamond and Related Materials 9, 703 (2000)
  9. "Nitrogen induced states at the CNx/Si interface"
    E. Evangelou, N. Konofaos, M. Gioti and S. Logothetidis
    Materials Science Engineering B 71, 315 (2000)
  10. "Magnetron sputtered carbon nitride: composition and chemical bonding of as-grown and post-annealed films studied with real-time & in-situ diagnostic techniques"
    M. Gioti, S. Logothetidis, P. Patsalas, A. Laskarakis, G. Panagiotatos, V. Kechagias
    Surface and Coatings Technology 125, 289 (2000)
  11. "Growth kinetics of sputtered amorphous carbon thin films: composition studies and phenomenological model"
    S. Logothetidis, P. Patsalas, M. Gioti, A. Galdikas, and L. Pranevicius
    Thin Solid Films 376, 56 (2000)
  12. "The effect of post-growth ion irradiation on the microstructure and the interface properties of amorphous carbon films on silicon"
    P. Patsalas, and S. Logothetidis
    J. Appl. Phys. 88, 6346 (2000)
  13. "Optical properties and new forms of as-grown and post-growth ion irradiated amorphous carbon films"
    S. Logothetidis
    Asian Journal of Physics 9, 643 (2000)
  14. "Noise characterization of rf sputtered amorphous carbon films"
    N. Hastas, C. A. Dimitriadis, Y. Panayiotatos, D. H. Tassis, P. Patsalas and S. Logothetidis
    Appl. Phys. Lett. 88, 5482 (2000)
  15. "Characterization of dc magnetron sputtering deposited thin films of TiN for use as a metal electrode on TiN/SiO2/Si MOS devices"
    E.K. Evangelou, N. Konofaos, X.A. Aslanoglou, C.A. Dimitriadis, P. Patsalas, S. Logothetidis, M. Kokkoris, E. Kossionides, R. Vlastou, G. Groetschel
    J. Appl. Phys. 88, 7192 (2000)
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